BUSINESS: ThermVac Develops Chemical Vapor Deposition Technologies For SiC (TaC), B44 And PYC

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by Daniel Webster, dWeb.News Publisher

January 05, 2022 02: 37 AM Eastern Standard Time

HWASEONG, South Korea–(BUSINESS WIRE)–ThermVac Inc., a manufacturer of special vacuum furnaces based in Korea, said that it keeps responding to the needs of domestic and foreign clients by developing process technology as well as design and manufacturing technology for CVD equipment, which can be widely applied in the high and ultra-high temperature ranging from 900degC to 2,400degC. This is in keeping with high-temperature heat-resistant CVD components for high-tech industries like semiconductor, solar power and mobile phones.

Since it secured the core elemental technology of CVD equipment while carrying out the localizing development project for SiC CVD equipment in the Korean government’s R&D support program in 2011, ThermVac has developed a variety of CVD systems for domestic and foreign markets, such as SiC CVD reactor for semiconductor/solar processing parts, TaC CVD reactor for ultra-high temperature processing parts, HfC/B4C/BN CVD reactor for aerospace or defense components, PYC CVD reactor for mobile phones or biomaterials and CVI furnace for carbon/SiC composite materials.

ThermVac is competitive in the field CVD equipment.

ThermVac has built in-house pilot CVD equipment that can raise the temperature up to 2,400degC. It conducts process testing using pilot equipment to determine the requirements of clients for different CVD equipment. It improves equipment reliability and provides basic process recipes to customers that are necessary for the initial equipment operation.

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